The Chemical Mechanical Polishing (CMP) process is now widely employed in the manufacture of Ultra-Large-Scale Integrated (ULSI) circuits. Yet, the effects of various process parameters on the material removal rate (MRR) and the resulting surface topography are not well understood. In this chapter, accordingly, several polishing models are reviewed

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Electro-Mechanical System (MEMS). In principle, CMP is a process of smoothing and planing surfaces with the combination of chemical and mechanical forces. It can, in a way, be thought of as a hybrid of chemical etching and free abrasive polishing. Mechanical grinding alone may theoretically achieve planarization but the surface damage is

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The effect of mechanical grinding on the electrochemical properties of P100 and P75 fibers and natural graphite UF4 was studied. The electrochemical experiments were conducted in the NaClO 4 –ethylene carbonate (EC) electrolyte. Graphite did not allow significant sodium intercalation intrinsically but P100 and P75 fibers, which display lower graphitization …

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Mechanical grinding is a method of manufacturing a common metal cutting, the bearing processing industry also been widely used, the bearing parts of heat hardening, or reticular cracking may occur more rules during grinding arrangement of small cracks, known as grinding cracks, it not only affects the appearance of bearing parts, more importantly, also …

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The Cologne-egg fastening systems applied in metro lines, which can be subjected to rail corrugation, are considered in this paper. To understand the mechanism of the formation and development of rail corrugation, dynamic models of the wheel and the track with Cologne-egg fastening system in the frequency domain are developed to analyse the wheel and track …

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grinding process includes determination of the coefficient of use of th e area of plates, cutting capacity and required power of the equipment. The operator scheme of mechanical processing of mea t consists of the subsystem of preliminary grinding of meat and subsystem of mechanical processing of minced meat.

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Harmful vibrations during mechanical processing (such as grinding or milling) have to be avoided since they deteriorate the quality of the product as well as have a negative effect on the human ...

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1250 MECHANICAL DESIGN OF MIXING EQUIPMENT Figure 21-1 Direct-drive portable mixer. (Courtesy of Lightnin.) mixers are mounted on the vertical centerline of a tank with baffles, but may be off-center or off-center, angle mounted.

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In order to reduce the effects of the gear profile deviations on the gear pitch deviations, the optimal forming principle of ultra-precision involute profile is adopted during the gear-grinding experiment. 9 The master gear with module m = 3 mm, the number of teeth z = 40, tooth width b = 25 mm, press angle α = 20° and helix angle β = 0° is ...

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the mechanical design requirements must be understood. The second step in the design sequence is the mechanical design of the mixer components. The fundamental approach is straight-forward, design for power (torque and speed), then shaft loads, and finally mixer dynamics. For larger systems above 100 hp it may be

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A three-dimensional thermal model that the grinding wheels are simplified as a moving heat source in the rail grinding process was established and used to explore the effect of grinding parameters ...

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The effects of mechanical grinding on morphology and electrochemical performance of graphite and soft carbon powders with respect to lithium insertion were studied. The morphology of the milled graphitic powders was found to depend strongly upon the nature of the interactions (e.g., impact or shear) generated by the two kinds of mixer mills used.

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The mechanical grinding process provokes a decrease of L m, this effect being more rapid in the first 5 h (258 Å). On further grinding, L m decreases less abruptly (167 Å at 100 h). For the non-ground graphitized coke sample the presence of microstrains is negligible, as found for well-crystallized graphite [6] .

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Grinding is the most common form of abrasive machining. It is a material cutting ... Grit geometry may undergo substantial change due to mechanical or chemical attrition leading to rounding or flattening of the sharp cutting points. This happens ... wheel diameter and circular pitch of the grits. The length of the undeformed c o

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To study the effect of back grinding on the mechanical properties of the active side of the die, low-k stacked wafers were grinded to four different …

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@article{osti_898584, title = {Sub-surface mechanical damage distributions during grinding of fused silica}, author = {Suratwala, T I and Wong, L L and Miller, P E and Feit, M D and Menapace, J A and Steele, R A and Davis, P A and Walmer, D}, abstractNote = {The distribution and characteristics of surface cracking (i.e. sub-surface damage or SSD) formed during …

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To study the effect of back grinding on the mechanical properties of the active side of the die, low-k stacked wafers were grinded to four different thicknesses of 500 mum, 300 mum, 150 mum, and ...

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